A 3D tomographic EBSD analysis of a CVD diamond thin film.
نویسندگان
چکیده
We have studied the nucleation and growth processes in a chemical vapor deposition (CVD) diamond film using a tomographic electron backscattering diffraction method (3D EBSD). The approach is based on the combination of a focused ion beam (FIB) unit for serial sectioning in conjunction with high-resolution EBSD. Individual diamond grains were investigated in 3-dimensions particularly with regard to the role of twinning.
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ورودعنوان ژورنال:
- Science and technology of advanced materials
دوره 9 3 شماره
صفحات -
تاریخ انتشار 2008